SIGRAFINE® SiC Coating

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Description

SIGRAFINE SiC Coating is a dense, wear-resistant silicon carbide coating. It has high corrosion and heat resistance properties as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process.

The coating improves product quality and increases process efficiency, thus reducing overall operating costs for our customers. This coating extends the service life of graphite components and achieves the high-purity surface structures required in processing semiconductor materials.

We supply SiC-coated products made from high-strength isostatic graphite and carbon fiber-reinforced carbon. These include components for fluidized-bed reactors and STC-TCS converters, as well as reflectors for CZ units and wafer carriers for PECVD, Si epitaxy, and MOCVD units.

Los datos sobre este material han sido proporcionados por SGL Carbon.

A menos que se indique lo contrario, todas las medidas corresponden a condiciones de temperatura ambiente. A menos que se indique lo contrario, se utilizan las unidades del SI.
Las normas armonizadas son similares a uno o varios estándares del proveedor. Es posible que algunas normas armonizadas se ajusten al estándar original, mientras que otras pueden quedar fuera de su alcance.

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All categories

Propiedades

General

Property	Value	Comment
Densidad aparente	3.2 g/cm³ Show Supplier Material materials with Densidad aparente of 3.2 g/cm³	XRD
Rugosidad superficial	2.5 μm Show Supplier Material materials with Rugosidad superficial of 2.5 μm	Profilemeter

Mecánica

Property	Value	Comment
Módulo elástico	435 GPa Show Supplier Material materials with Módulo elástico of 435 GPa	Nanoindentation

Aplicaciones térmicas

Property	Value	Comment
Coeficiente de dilatación térmica	4.2999999999999995e-06 1/K Show Supplier Material materials with Coeficiente de dilatación térmica of 4.2999999999999995e-06 1/K	@100-600°C; Dilatometer

Óptico

Property	Value
Orientación del plano óptico	111 preferred via XRD

Chemical properties

Property	Value	Comment
Aluminio	4e-06 % Show Supplier Material materials with Aluminio of 4e-06 %	max.
Antimonio	1e-06 % Show Supplier Material materials with Antimonio of 1e-06 %	max.
Arsénico	5e-07 % Show Supplier Material materials with Arsénico of 5e-07 %	max.
Azufre	4e-06 % Show Supplier Material materials with Azufre of 4e-06 %	max.
Bismuto	1e-06 % Show Supplier Material materials with Bismuto of 1e-06 %	max.
Calcio	4.9999999999999996e-06 % Show Supplier Material materials with Calcio of 4.9999999999999996e-06 %	max.
Cobre	1e-06 % Show Supplier Material materials with Cobre of 1e-06 %	max.
Cromo	4.9999999999999996e-06 % Show Supplier Material materials with Cromo of 4.9999999999999996e-06 %	max.
Estaño	1e-06 % Show Supplier Material materials with Estaño of 1e-06 %	max.
Fósforo	1e-06 % Show Supplier Material materials with Fósforo of 1e-06 %	max.
Galio	5e-06 % Show Supplier Material materials with Galio of 5e-06 %	max.
Germanio	5e-06 % Show Supplier Material materials with Germanio of 5e-06 %	max.
Hierro	1e-06 % Show Supplier Material materials with Hierro of 1e-06 %	max.
Indio	1e-06 % Show Supplier Material materials with Indio of 1e-06 %	max.
Magnesio	1e-06 % Show Supplier Material materials with Magnesio of 1e-06 %	max.
Manganeso	5e-07 % Show Supplier Material materials with Manganeso of 5e-07 %	max.
Níquel	5e-07 % Show Supplier Material materials with Níquel of 5e-07 %	max.
Plomo	1e-06 % Show Supplier Material materials with Plomo of 1e-06 %	max.
Potasio	5e-06 % Show Supplier Material materials with Potasio of 5e-06 %	max.
Sodio	5e-06 % Show Supplier Material materials with Sodio of 5e-06 %	max.
Telurio	1e-06 % Show Supplier Material materials with Telurio of 1e-06 %	max.
Titanio	5e-07 % Show Supplier Material materials with Titanio of 5e-07 %	max.
Vanadio	1e-07 % Show Supplier Material materials with Vanadio of 1e-07 %	max.
Wolframio	1e-06 % Show Supplier Material materials with Wolframio of 1e-06 %	max.
Zinc	5e-06 % Show Supplier Material materials with Zinc of 5e-06 %	max.

Technological properties

Property

Application areas

Coating for components for fluidized-bed reactors and STC-TCS converters, as well as reflectors for CZ units and wafer carriers for PECVD, Si epitaxy, and MOCVD units.

Processing methods

CVD

SIGRAFINE® SiC Coating

Description

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Usos

Materiales de este proveedor

Casos de uso

Propiedades