One part of the Physical Vapour Deposition (PVD) process is the thermal evaporation (resistance evaporation) coating method. The material intended to form the subsequent layer is heated in a vacuum chamber until evaporation. The thus formed vapour condenses on the substrate and forms the required material layer.
Plansee’s evaporation coils know how to turn up the heat: With their very high melting points, basically any material can be brought to the boil by these resistance heaters. In addition, substrate contamination is inhibited by the excellent corrosion resistance and the outstanding purity of the material.
Plansee manufactures evaporation coils from the following materials:
• Tantalum
• Molybdenum
• Molybdenum-lanthanum (ML) for increased service lives
• Grain stabilised tungsten (WVM) for the evaporation of aluminium
Plansee also supplies evaporation coils customised according to specific customer demands.
