SIGRAFINE® SiC Coating

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Description

SIGRAFINE SiC Coating is a dense, wear-resistant silicon carbide coating. It has high corrosion and heat resistance properties as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process.

The coating improves product quality and increases process efficiency, thus reducing overall operating costs for our customers. This coating extends the service life of graphite components and achieves the high-purity surface structures required in processing semiconductor materials.

We supply SiC-coated products made from high-strength isostatic graphite and carbon fiber-reinforced carbon. These include components for fluidized-bed reactors and STC-TCS converters, as well as reflectors for CZ units and wafer carriers for PECVD, Si epitaxy, and MOCVD units.

This material data has been provided by SGL Carbon.

"Typical" values were obtained via a literature search. "Predicted" values were imputed via artificial intelligence technology. While we have placed significant efforts in ensuring data accuracy, "typical" and "predicted" data should be considered indicative and verified by appropriate material testing. Please do contact us if additional information on the the predicted data method is required.
All metrics apply to room temperature unless otherwise stated. SI units used unless otherwise stated.
Equivalent standards are similar to one or more standards provided by the supplier. Some equivalent standards may be stricter whereas others may be outside the bounds of the original standard.

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Properties

General

Property	Value	Comment
Bulk density	3.2 g/cm³ Show Supplier Material materials with Bulk density of 3.2 g/cm³	XRD
Surface roughness	2.5 μm Show Supplier Material materials with Surface roughness of 2.5 μm	Profilemeter

Mechanical

Property	Value	Comment
Elastic modulus	435 GPa Show Supplier Material materials with Elastic modulus of 435 GPa	Nanoindentation

Thermal

Property	Value	Comment
Coefficient of thermal expansion	4.2999999999999995e-06 1/K Show Supplier Material materials with Coefficient of thermal expansion of 4.2999999999999995e-06 1/K	@100-600°C; Dilatometer

Optical

Property	Value
Optical plane orientation	111 preferred via XRD

Chemical properties

Property	Value	Comment
Aluminium	4e-06 % Show Supplier Material materials with Aluminium of 4e-06 %	max.
Antimony	1e-06 % Show Supplier Material materials with Antimony of 1e-06 %	max.
Arsenic	5e-07 % Show Supplier Material materials with Arsenic of 5e-07 %	max.
Bismuth	1e-06 % Show Supplier Material materials with Bismuth of 1e-06 %	max.
Calcium	4.9999999999999996e-06 % Show Supplier Material materials with Calcium of 4.9999999999999996e-06 %	max.
Chromium	4.9999999999999996e-06 % Show Supplier Material materials with Chromium of 4.9999999999999996e-06 %	max.
Copper	1e-06 % Show Supplier Material materials with Copper of 1e-06 %	max.
Gallium	5e-06 % Show Supplier Material materials with Gallium of 5e-06 %	max.
Germanium	5e-06 % Show Supplier Material materials with Germanium of 5e-06 %	max.
Indium	1e-06 % Show Supplier Material materials with Indium of 1e-06 %	max.
Iron	1e-06 % Show Supplier Material materials with Iron of 1e-06 %	max.
Lead	1e-06 % Show Supplier Material materials with Lead of 1e-06 %	max.
Magnesium	1e-06 % Show Supplier Material materials with Magnesium of 1e-06 %	max.
Manganese	5e-07 % Show Supplier Material materials with Manganese of 5e-07 %	max.
Nickel	5e-07 % Show Supplier Material materials with Nickel of 5e-07 %	max.
Phosphorus	1e-06 % Show Supplier Material materials with Phosphorus of 1e-06 %	max.
Potassium	5e-06 % Show Supplier Material materials with Potassium of 5e-06 %	max.
Sodium	5e-06 % Show Supplier Material materials with Sodium of 5e-06 %	max.
Sulfur	4e-06 % Show Supplier Material materials with Sulfur of 4e-06 %	max.
Tellurium	1e-06 % Show Supplier Material materials with Tellurium of 1e-06 %	max.
Tin	1e-06 % Show Supplier Material materials with Tin of 1e-06 %	max.
Titanium	5e-07 % Show Supplier Material materials with Titanium of 5e-07 %	max.
Tungsten	1e-06 % Show Supplier Material materials with Tungsten of 1e-06 %	max.
Vanadium	1e-07 % Show Supplier Material materials with Vanadium of 1e-07 %	max.
Zinc	5e-06 % Show Supplier Material materials with Zinc of 5e-06 %	max.

Technological properties

Property

Application areas

Coating for components for fluidized-bed reactors and STC-TCS converters, as well as reflectors for CZ units and wafer carriers for PECVD, Si epitaxy, and MOCVD units.

Processing methods

CVD

SIGRAFINE® SiC Coating

Description

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Applications

Materials by this supplier

Use cases

Properties